Applied Materials – Seite 2 – SFI

ENI DPGD-10
0190-36343

Pneumatic Control PCB
0100-09008

Power Supply 24V/32A 24V/15A 5V/60A
1140-01234

Remote Gas Panel
0100-09031

Lamp Driver Degas SCR
0190-01496

System Electrnics Interface
0100-20001

AE AZX 63
0190-01371

Seriplex I/O
0100-35231

RF Match Etch
0010-09416

Thermistor Gauge PCB
0100-90077

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